06.03.2021
New manufacturing capabilities - wafer fab upgrade

New manufacturing capabilities - wafer fab upgrade

To expand the technical and production capabilities of CMOS ICs manufacturing, Zelenograd Nanotechnology Center began to expand, modernize and re-equip its current facilities.

The main objectives of the project are to organize a manufacturing line for processing silicon wafers with a diameter of 8" (200 mm) with a design standard of 130 nanometers. The wafer fab modernization allows domestic enterprises and fabless design centers to have access to modern technologies, including IoT, RFID, NVM.

It is planned to modernize the existing equipment and purchase new technological and instrumentation tools. There are also plans to implement a promising technology of copper metallization, the so-called "dual damascene" process.